Initial oxidation of Si(311) surfaces studied by high-resolution electron energy loss spectroscopy
作者： Hiroya Ikeda , Tohru Yamada , Koji Hotta , Shigeaki Zaima , Yukio Yasuda
DOI: 10.1016/0169-4332(96)00314-5
关键词: Electron energy loss spectroscopy 、 Dangling bond 、 Oxygen 、 High resolution electron energy loss spectroscopy 、 Molecule 、 Hydrogen 、 Adsorption 、 Dimer 、 Physical chemistry 、 Chemistry
摘要: Abstract Surface reactions of Si(311) surfaces with hydrogen, oxygen, and water have been investigated by high-resolution electron energy loss spectroscopy (HREELS). The structure ofSi(311)-3 × 1clean is transformed to a1 1structure exposure atomic hydrogen H-terminated are stable against the O2 adsorption at room temperature. On other hand, H2O-adsorbed surface a3 1structure, H2O molecules considered adsorb dissociatively only on dangling bonds dimer atoms but not those step-site atoms. experimental data suggests that the(311)-3 1surface stabilized adsorption.
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