Organometallic chemical vapor deposition of platinum. Reaction kinetics and vapor pressures of precursors
作者： Ziling Xue , Hareesh Thridandam , Herbert D. Kaesz , Robert F. Hicks
DOI: 10.1021/CM00019A032
关键词: Deposition (phase transition) 、 Chemical kinetics 、 Platinum 、 Chemical engineering 、 Combustion chemical vapor deposition 、 Chemistry 、 Hybrid physical-chemical vapor deposition 、 Physical chemistry 、 Chemical vapor deposition
摘要: … The strong effect of the reactor composition on the length of the induction period suggests that the reaction occurring during this initial stage of chemical vapor deposition is …
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