Effect of addition Pb content on lead titanate thin films for MIM capacitor

作者: Z Nurbaya , M Rusop

DOI: 10.1088/1757-899X/58/1/012003

关键词: Composite materialCrystal growthCapacitorLead titanateThin filmPolarization (electrochemistry)FerroelectricityPermittivityCrystallizationMaterials scienceElectronic engineering

摘要: Lead titanate (PbTiO3) has been precisely studied on the films preparation due to its unique perovskite structure having ferroelectric behaviour with high permittivity factor for complex storage applications such as capacitor, transistor, and random access memory. In need have quality thin films, lead (Pb) volatilization during crystallization process by means of applying heat treatment part crystal growth purpose must be realized. Therefore addition Pb excess is highest consideration in based composite ensure perfect ever form well yield great particles polarization. There are some issues like fatigue, imprinting, leakage current that considered assess performance. However, present study focuses only crucial issue nanoscaled thickness might relation microstructural properties films. Thus, influence extra content ascertain benefits PbTiO3 towards performance metal-insulator-metal capacitor.

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