The effect of excess Pb content on the crystallization and electrical properties in sol–gel derived Pb (Zr0.4Ti0.6)O3 thin films

作者: Jun-Kyu Yang , Woo Sik Kim , Hyung-Ho Park

DOI: 10.1016/S0040-6090(00)01325-0

关键词:

摘要: Abstract The crystallization behavior and electrical properties are closely related to the excess Pb content in PZT (Zr/Ti=40/60) thin films. However, role of crystalline growth has not been precisely defined. In this work, effect on ferroelectric these films was investigated. To analyze effect, containing various amounts Pb, but with same grain size film orientation, were prepared. case derived from solutions a high excess-Pb content, more nuclei formed, grew into smaller-sized grains than low content. On other hand, conversion (100)- (111)-preferred orientation observed as result time-dependent bi-orientational growth. A depth profile analysis using Auger electron spectroscopy revealed that enhanced formation Ti-rich at Pt/PZT interface. This seemed be origin (111) As higher included, showed permittivity, lower distribution space charge layer better resistance against repeating fatigue cycles, due inhibition movement vacancies. These phenomena could applied via oxygen vacancy accumulation

参考文章(19)
Xiaofeng Du, I.-Wei Chen, Fatigue of Pb(Zr0.53Ti0.47)O3 ferroelectric thin films Journal of Applied Physics. ,vol. 83, pp. 7789- 7798 ,(1998) , 10.1063/1.367953
Peter Mark, Murray A. Lampert, Current injection in solids ,(1970)
S. A. Impey, Z. Huang, A. Patel, R. Beanland, N. M. Shorrocks, R. Watton, R. W. Whatmore, Microstructural characterization of sol–gel lead–zirconate–titanate thin films Journal of Applied Physics. ,vol. 83, pp. 2202- 2208 ,(1998) , 10.1063/1.366957
G. M. Davis, M. C. Gower, Epitaxial growth of thin films of BaTiO3using excimer laser ablation Applied Physics Letters. ,vol. 55, pp. 112- 114 ,(1989) , 10.1063/1.102393
Yukio Sakashita, Hideo Segawa, Kouji Tominaga, Masaru Okada, Dependence of electrical properties on film thickness in Pb(ZrxTi1−x)O3 thin films produced by metalorganic chemical vapor deposition Journal of Applied Physics. ,vol. 73, pp. 7857- 7863 ,(1993) , 10.1063/1.353936
S. B. Krupanidhi, N. Maffei, M. Sayer, K. El‐Assal, rf planar magnetron sputtering and characterization of ferroelectric Pb(Zr,Ti)O3films Journal of Applied Physics. ,vol. 54, pp. 6601- 6609 ,(1983) , 10.1063/1.331895
Hideaki Adachi, Tsuneo Mitsuyu, Osamu Yamazaki, Kiyotaka Wasa, Ferroelectric (Pb,La)(Zr,Ti)O3epitaxial thin films on sapphire grown by rf‐planar magnetron sputtering Journal of Applied Physics. ,vol. 60, pp. 736- 741 ,(1986) , 10.1063/1.337423
S. Aggarwal, S. Madhukar, B. Nagaraj, I. G. Jenkins, R. Ramesh, L. Boyer, J. T. Evans, Can lead nonstoichiometry influence ferroelectric properties of Pb(Zr,Ti)O3 thin films? Applied Physics Letters. ,vol. 75, pp. 716- 718 ,(1999) , 10.1063/1.124492
Donghwan Kim, D. L. Williamson, John U. Trefny, Bin Qi, Effects of Postdeposition Heat‐Treatment on Morphology and Microstructure of CdTe Grown by Electrodeposition Journal of The Electrochemical Society. ,vol. 143, pp. 517- 523 ,(1996) , 10.1149/1.1836474
Kazushi Amanuma, Takashi Hase, Yoichi Miyasaka, Crystallization behavior of sol‐gel derived Pb(Zr,Ti)O3 thin films and the polarization switching effect on film microstructure Applied Physics Letters. ,vol. 65, pp. 3140- 3142 ,(1994) , 10.1063/1.112461