Microstructural characterization of sol–gel lead–zirconate–titanate thin films
作者： S. A. Impey , Z. Huang , A. Patel , R. Beanland , N. M. Shorrocks
DOI: 10.1063/1.366957
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摘要: The techniques of x-ray diffraction, photoelectron spectroscopy (XPS), Auger analysis, and transmission scanning electron microscopy (TEM) have been applied to the analysis thin films Pb(Zr0.30Ti0.70)O3 (PZT30/70) deposited at low temperatures (510 °C) by a sol–gel process onto Pt/Ti electrodes on SiO2/Si 100 substrates. It is found that platinum film highly oriented with [111] axis perpendicular substrate plane. ferroelectric tends crystallize epitaxially upon this as columnar crystals. There are indications from TEM existence second metallic phase interface between PZT30/70 film, which may be associated its nucleation. shows boundaries individual layers, although growing crystallites propagate through these unhindered. XPS analyses shown Pb penetrates Pt layer underlying Ti layer, even ...
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