作者: Edward W. Kiewra , Peter C. Wayner
DOI: 10.1149/1.2096722
关键词: Materials science 、 Thermistor 、 Silicon carbide 、 Silicon 、 Thin film 、 Optics 、 Temperature measurement 、 Evaporation 、 Wafer 、 Optoelectronics 、 Electronic data
摘要: A linear thin‐film array of silicon carbide thermistors has been developed to measure temperature profiles near the contact line an evaporating liquid meniscus. The consists 80, square on a 3 in. diam single crystal silicon. devices are spaced at 50, 250, and 1000 μm intervals along wafer. Temperature data obtained through use external electronic acquisition system. This arrangement enables accurate evaluation heat flux occurring in thin film, it should also be suitable for measurements many other situations.