The development of a thin-film silicon carbide thermistor array for determining temperature profiles in an evaporating liquid film

作者: Edward W. Kiewra , Peter C. Wayner

DOI: 10.1149/1.2096722

关键词: Materials scienceThermistorSilicon carbideSiliconThin filmOpticsTemperature measurementEvaporationWaferOptoelectronicsElectronic data

摘要: A linear thin‐film array of silicon carbide thermistors has been developed to measure temperature profiles near the contact line an evaporating liquid meniscus. The consists 80, square on a 3 in. diam single crystal silicon. devices are spaced at 50, 250, and 1000 μm intervals along wafer. Temperature data obtained through use external electronic acquisition system. This arrangement enables accurate evaluation heat flux occurring in thin film, it should also be suitable for measurements many other situations.

参考文章(0)