MeV Au ion induced modifications at Co/Si interface
作者： J. Ghatak , D. Kabiraj , P.V. Satyam
DOI: 10.1016/J.APSUSC.2009.08.063
关键词: High-resolution transmission electron microscopy 、 Ultra-high vacuum 、 Ion beam mixing 、 Electron beam physical vapor deposition 、 Materials science 、 Ion 、 Transmission electron microscopy 、 Fluence 、 Analytical chemistry 、 Thin film 、 Surfaces, Coatings and Films
摘要: Abstract We report on room temperature MeV Au ion induced modifications at the Co/Si interfaces. Nanometers size thin film of Co and Si were grown by ultra high vacuum (UHV) electron beam evaporation technique Si(1 1 1) surface irradiated 1.5 MeV Au2+ ions a fluence 5 × 1014 ions cm−2. High-resolution transmission microscopy (HRTEM) along with energy filter imaging has been employed to study formation Co–Si alloy interface. Formation such discussed in light ion-matter interaction nanometer scale regime.
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L. Reimer, Energy-Filtering Transmission Electron Microscopy Advances in Electronics and Electron Physics. ,vol. 81, pp. 43- 126 ,(1991) , 10.1016/S0065-2539(08)60863-X
D Bhattacharya, S.K Srivastava, P.K Sahoo, G Principi, D Kabiraj, T Som, V.N Kulkarni, D.K Avasthi, Swift heavy ion induced modification of the Co/Si interface; cobalt silicide formation Surface & Coatings Technology. pp. 59- 63 ,(2002) , 10.1016/S0257-8972(02)00216-5
L. Bischoff, K.-H. Heinig, J. Teichert, W. Skorupa, Submicron CoSi2 structures fabricated by focused ion beam implantation and local flash lamp melting Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 112, pp. 201- 205 ,(1996) , 10.1016/0168-583X(95)01250-8
B. Satpati, D.K. Goswami, U.D. Vaishnav, T. Som, B.N. Dev, P.V. Satyam, Energy spike induced effects in MeV ion-irradiated nanoislands Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 212, pp. 157- 163 ,(2003) , 10.1016/S0168-583X(03)01453-8
D. Bahr, W. Press, R. Jebasinski, S. Mantl, X-ray reflectivity and diffuse-scattering study of CoSi2 layers in Si produced by ion-beam synthesis. Physical Review B. ,vol. 47, pp. 4385- 4393 ,(1993) , 10.1103/PHYSREVB.47.4385
J. Ghatak, B. Sundaravel, K.G.M. Nair, P.V. Satyam, Flux dependent MeV ion induced modification of nano-Ag/Si system Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 266, pp. 1282- 1286 ,(2008) , 10.1016/J.NIMB.2007.11.039
Alice E. White, K.T. Short, R.C. Dynes, R. Hull, J.M. Vandenberg, Mesotaxy: Synthesis of buried single-crystal silicide layers by implantation Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 39, pp. 253- 258 ,(1989) , 10.1016/0168-583X(89)90782-9
Yang-Tse Cheng, Thermodynamic and fractal geometric aspects of ion-solid interactions Materials Science Reports. ,vol. 5, pp. 45- 97 ,(1990) , 10.1016/S0920-2307(05)80007-6
B. Satpati, P.V. Satyam, T. Som, B.N. Dev, Nanoscale ion-beam mixing in Au–Si and Ag–Si eutectic systems Applied Physics A. ,vol. 79, pp. 447- 451 ,(2004) , 10.1007/S00339-004-2703-1
P. V. Satyam, J. Kamila, S. Mohapatra, B. Satpati, D. K. Goswami, B. N. Dev, R. E. Cook, Lahsen Assoufid, J. Wang, N. C. Mishra, Crater formation in gold nanoislands due to MeV self-ion irradiation Journal of Applied Physics. ,vol. 93, pp. 6399- 6401 ,(2003) , 10.1063/1.1569026