Atomic force acoustic microscopy methods to determine thin-film elastic properties

摘要: We discuss atomic force acoustic microscopy (AFAM) methods to determine quantitative values for the elastic properties of thin films. The AFAM approach measures frequencies an AFM cantilever’s first two flexural resonances while in contact with a material. indentation modulus M unknown or test material can be obtained by comparing resonant spectrum that reference examined niobium film (d=280±30 nm) using separate materials and different cantilever geometries. Data were analyzed methods: analytical model based on conventional beam dynamics, finite element method accommodated variable cross section viscous damping. varied significantly depending specific experimental configuration analysis technique. By averaging both materials, very good agreement (5–10 % difference) determined other was achieved. T...