Frequency tunable resonant magnetoelectric sensors for the detection of weak magnetic field
作者： Jingxiang Su , Florian Niekiel , Simon Fichtner , Christine Kirchhof , Dirk Meyners
关键词: Piezoelectricity 、 Resonance 、 Vector field 、 Piezoelectric actuators 、 Magnetic field 、 Materials science 、 Resonator 、 Microelectromechanical systems 、 Optoelectronics 、 Dc voltage
摘要: This paper reports on frequency tunable MEMS magnetoelectric sensors. Different designs are studied in respect to voltage coefficient and tunability. Compared state-of-the-art ME sensors, the presented resonators display a highly reversible linear tuning, enabled by applying DC piezoelectric actuators. A shift of up 0.2 Hz/V is demonstrated for sensor with limit detection 128 pT/Hz0.5 at resonance 13 kHz. type particular interest vector field sensors arrays bio-magnetic applications, where either identical frequencies or precisely defined spacing required.
harvard.edu
sci-hub.se 参考文章(25)
Henry Greve, Eric Woltermann, Hans-Joachim Quenzer, Bernhard Wagner, Eckhard Quandt, Giant magnetoelectric coefficients in (Fe90Co10)78Si12B10-AlN thin film composites Applied Physics Letters. ,vol. 96, pp. 182501- ,(2010) , 10.1063/1.3377908
S. Marauska, R. Jahns, C. Kirchhof, M. Claus, E. Quandt, R. Knöchel, B. Wagner, Highly sensitive wafer-level packaged MEMS magnetic field sensor based on magnetoelectric composites Sensors and Actuators A-physical. ,vol. 189, pp. 321- 327 ,(2013) , 10.1016/J.SNA.2012.10.015
Stephan Marauska, Robert Jahns, Henry Greve, Eckhard Quandt, Reinhard Knöchel, Bernhard Wagner, MEMS magnetic field sensor based on magnetoelectric composites Journal of Micromechanics and Microengineering. ,vol. 22, pp. 065024- ,(2012) , 10.1088/0960-1317/22/6/065024
Christine Kirchhof, Matthias Krantz, Iulian Teliban, Robert Jahns, Stephan Marauska, Bernhard Wagner, Reinhard Knöchel, Martina Gerken, Dirk Meyners, Eckhard Quandt, Giant magnetoelectric effect in vacuum Applied Physics Letters. ,vol. 102, pp. 232905- ,(2013) , 10.1063/1.4810750
S. Baillet, J.C. Mosher, R.M. Leahy, Electromagnetic brain mapping IEEE Signal Processing Magazine. ,vol. 18, pp. 14- 30 ,(2001) , 10.1109/79.962275
Junyi Zhai, Zengping Xing, Shuxiang Dong, Jiefang Li, D. Viehland, Detection of pico-Tesla magnetic fields using magneto-electric sensors at room temperature Applied Physics Letters. ,vol. 88, pp. 062510- ,(2006) , 10.1063/1.2172706
Robert Jahns, Reinhard Knochel, Henry Greve, Eric Woltermann, Enno Lage, Eckard Quandt, Magnetoelectric sensors for biomagnetic measurements ieee international symposium on medical measurements and applications. pp. 107- 110 ,(2011) , 10.1109/MEMEA.2011.5966676
Jonathan R Petrie, Jonathan Fine, Sanjay Mandal, Gollapudi Sreenivasulu, Gopalan Srinivasan, Alan S Edelstein, None, Enhanced sensitivity of magnetoelectric sensors by tuning the resonant frequency Applied Physics Letters. ,vol. 99, pp. 043504- ,(2011) , 10.1063/1.3617428
V. Hrkac, E. Lage, G. Köppel, J. Strobel, J. McCord, E. Quandt, D. Meyners, L. Kienle, Amorphous FeCoSiB for exchange bias coupled and decoupled magnetoelectric multilayer systems: Real-structure and magnetic properties Journal of Applied Physics. ,vol. 116, pp. 134302- ,(2014) , 10.1063/1.4896662
S. Marauska, M. Claus, T. Lisec, B. Wagner, Low temperature transient liquid phase bonding of Au/Sn and Cu/Sn electroplated material systems for MEMS wafer-level packaging Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 19, pp. 1119- 1130 ,(2013) , 10.1007/S00542-012-1708-5