Silica membranes for hydrogen separation prepared by chemical vapor deposition (CVD)

作者: Sheima J. Khatib , S. Ted Oyama

DOI: 10.1016/J.SEPPUR.2013.03.032

关键词: Chemical engineeringKnudsen diffusionMaterials scienceMembrane reactorGas separationSiliconMembraneChromatographyPermeationChemical vapor depositionHydrogen

摘要: … The two most studied techniques for deposition of silica materials on porous supports are sol–gel chemistry and chemical vapor deposition (CVD). Sol–gel modification usually consists …

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