An accurate and simple universal curve for the energy‐dependent electron inelastic mean free path
作者： M. P. Seah
DOI: 10.1002/SIA.4816
关键词: Energy dependent 、 Root mean square 、 Sum rule in quantum mechanics 、 Inelastic mean free path 、 Universal curve 、 Optics 、 Simple (abstract algebra) 、 Electron 、 Chemistry 、 3D optical data storage 、 Computational physics
摘要: The values of inelastic mean free paths (IMFPs) calculated from optical data for the three material categories elements, inorganic compounds and organic are re-assessed to provide a simple equation giving an estimate IMFP, knowing only identities elements in analysed layer atomic density that layer. This is required quantification thicknesses layers mixed which parameters use popular equation, TPP-2M, insufficiently known. It describes published values, energies above 100 eV, similar root square (RMS) deviation as TPP-2M categories. RMS all averages 8.4%, provided ‘corrected’ sum rule errors. If, layer, identified unknown, i.e. average Z value known, simpler relation IMFP monolayers with one unknown parameter exhibits IMFPs 11.5%. Copyright © 2011 Crown copyright.
sci-hub.se 参考文章(20)
I. Lindau, W.E. Spicer, The probing depth in photoemission and auger-electron spectroscopy Journal of Electron Spectroscopy and Related Phenomena. ,vol. 3, pp. 409- 413 ,(1974) , 10.1016/0368-2048(74)80024-1
C.J. Powell, Attenuation lengths of low-energy electrons in solids Surface Science. ,vol. 44, pp. 29- 46 ,(1974) , 10.1016/0039-6028(74)90091-0
C.J. Powell, The quest for universal curves to describe the surface sensitivity of electron spectroscopies Journal of Electron Spectroscopy and Related Phenomena. ,vol. 47, pp. 197- 214 ,(1988) , 10.1016/0368-2048(88)85012-6
S. Tanuma, C. J. Powell, D. R. Penn, Calculations of electron inelastic mean free paths. V. Data for 14 organic compounds over the 50-2000 eV range Surface and Interface Analysis. ,vol. 21, pp. 165- 176 ,(1994) , 10.1002/SIA.740210302
J. J. Lander, AUGER PEAKS IN THE ENERGY SPECTRA OF SECONDARY ELECTRONS FROM VARIOUS MATERIALS Physical Review. ,vol. 91, pp. 1382- 1387 ,(1953) , 10.1103/PHYSREV.91.1382
P. W. Palmberg, T. N. Rhodin, Auger Electron Spectroscopy of fcc Metal Surfaces Journal of Applied Physics. ,vol. 39, pp. 2425- 2432 ,(1968) , 10.1063/1.1656571
Edwin R. Jones, James T. McKinney, Maurice B. Webb, Surface Lattice Dynamics of Silver. I. Low-Energy Electron Debye-Waller Factor Physical Review. ,vol. 151, pp. 476- 483 ,(1966) , 10.1103/PHYSREV.151.476
S. Tanuma, T. Shiratori, T. Kimura, K. Goto, S. Ichimura, C. J. Powell, Experimental determination of electron inelastic mean free paths in 13 elemental solids in the 50 to 5000 eV energy range by elastic‐peak electron spectroscopy Surface and Interface Analysis. ,vol. 37, pp. 833- 845 ,(2005) , 10.1002/SIA.2102
M.P. Seah, Quantitative Auger electron spectroscopy and electron ranges Surface Science. ,vol. 32, pp. 703- 728 ,(1972) , 10.1016/0039-6028(72)90196-3
M. P. Seah, I. S. Gilmore, Simplified equations for correction parameters for elastic scattering effects in AES and XPS forQ, ? and attenuation lengths Surface and Interface Analysis. ,vol. 31, pp. 835- 846 ,(2001) , 10.1002/SIA.1113