Tensile mechanical behaviors of cubic silicon carbide thin films

作者: Wen-Xiu Wang , Li-Sha Niu , Yang-Yang Zhang , En-Qiang Lin

DOI: 10.1016/J.COMMATSCI.2012.05.035

关键词: ModulusNanometreYoung's modulusElongationThin filmComposite materialCharacteristic lengthUltimate tensile strengthBulk modulusMaterials scienceNanotechnology

摘要: Abstract Molecular dynamics (MD) methods using Tersoff potential are employed to study the nanomechanical behaviors of 3C-SiC (0 1 0) thin films under [1 0 0]-oriented tension. In this work, Young’s modulus, tensile strength and elongation compared with those bulk for different temperatures. The results show that modulus nanofilms is size dependent softer than its counterpart. It found decreases as much 24.7% when thickness film reduces unit lattice, which suggests effect could not be neglected characteristic length shrinks down several nanometers. When more 10 nm, value converges value. As increment very slow, effects neglected. addition, reduction in nanofilm increasing temperature exhibits a nonlinear trend. Moreover, simulations demonstrate also increase temperature. Despite partial degradation, SiC maintains mechanical properties largely at elevated temperatures, makes it attractive applications high environment.

参考文章(61)
Gary Lynn Harris, Inspec, Properties of Silicon Carbide ,(1995)
CH Park, Byoung-Ho Cheong, Keun-Ho Lee, Kee-Joo Chang, None, STRUCTURAL AND ELECTRONIC-PROPERTIES OF CUBIC, 2H, 4H, AND 6H SIC Physical Review B. ,vol. 49, pp. 4485- 4493 ,(1994) , 10.1103/PHYSREVB.49.4485
Jong-In Im, Byoung-Woo Park, Ho-Yong Shin, Jong-Ho Kim, Temperature Dependence on Elastic Constant of SiC Ceramics Journal of The Korean Ceramic Society. ,vol. 47, pp. 491- 497 ,(2010) , 10.4191/KCERS.2010.47.6.491
W. R. L. Lambrecht, B. Segall, M. Methfessel, M. van Schilfgaarde, Calculated elastic constants and deformation potentials of cubic SiC. Physical Review B. ,vol. 44, pp. 3685- 3694 ,(1991) , 10.1103/PHYSREVB.44.3685
Narayanan Rajan, Christian A Zorman, Mehran Mehregany, Russell DeAnna, Rex Harvey, Performance of 3C-SiC thin films as protective coatings for silicon-micromachined atomizers Thin Solid Films. ,vol. 315, pp. 170- 178 ,(1998) , 10.1016/S0040-6090(97)00708-6
Meijie Tang, Sidney Yip, Atomistic simulation of thermomechanical properties of β-SiC Physical Review B. ,vol. 52, pp. 15150- 15159 ,(1995) , 10.1103/PHYSREVB.52.15150
C. Gourbeyre, T. Chassagne, M. Le Berre, G. Ferro, E. Gautier, Y. Monteil, D. Barbier, Correlation between epitaxial growth conditions of 3C–SiC thin films on Si and mechanical behavior of 3C–SiC self-suspended membranes Sensors and Actuators A-physical. ,vol. 99, pp. 31- 34 ,(2002) , 10.1016/S0924-4247(01)00886-X
Huimin Pan, Xiuyong Si, Molecular dynamics simulations of diameter dependence tensile behavior of silicon carbide nanotubes Physica B-condensed Matter. ,vol. 404, pp. 1809- 1812 ,(2009) , 10.1016/J.PHYSB.2009.02.028
C. T. Sun, Haitao Zhang, Size-dependent elastic moduli of platelike nanomaterials Journal of Applied Physics. ,vol. 93, pp. 1212- 1218 ,(2003) , 10.1063/1.1530365
Tae Yeon Kim, Sang Soo Han, Hyuck Mo Lee, Nanomechanical Behavior of β-SiC Nanowire in Tension : Molecular Dynamics Simulations Materials Transactions. ,vol. 45, pp. 1442- 1449 ,(2004) , 10.2320/MATERTRANS.45.1442