Control of Grain Structure of Laser-Deposited (Ba,Sr)TiO3 Films to Reduce Leakage Current.
作者： Pijush Bhattacharya , Kyung-ho Park , Yasushiro Nishioka
DOI: 10.1143/JJAP.33.5231
关键词: Dielectric 、 Strontium titanate 、 Amorphous solid 、 Annealing (metallurgy) 、 Crystal structure 、 Materials science 、 Chemical engineering 、 Thin film 、 Mineralogy 、 Crystallization 、 Microstructure
摘要: A new technique to realise a low leakage current of (Ba, Sr)TiO 3 (BSTO) thin films by controlling the grain structure BSTO has been proposed. This includes deposition amorphous at 500 o C and annealing 650 in O 2 for crystallization. The film producted from one was significantly lower than that deposited directly substrate temperature C. crystalline produced found be circular. In contrast, as-grown showed columnar structures. reduction may attributed differences structures
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jsap.jp参考文章(2)
Tsuyoshi Horikawa, Noboru Mikami, Tetsuro Makita, Junji Tanimura, Masayuki Kataoka, Kazunao Sato, Masahiro Nunoshita, Dielectric Properties of (Ba, Sr)TiO3Thin Films Deposited by RF Sputtering Japanese Journal of Applied Physics. ,vol. 32, pp. 4126- 4130 ,(1993) , 10.1143/JJAP.32.4126
Pijush Bhattacharya, Tadahiro Komeda, Kyung-ho Park, Yasushiro Nishioka, Comparative Study of Amorphous and Crystalline (Ba, Sr)TiO3Thin Films Deposited by Laser Ablation Japanese Journal of Applied Physics. ,vol. 32, pp. 4103- 4106 ,(1993) , 10.1143/JJAP.32.4103