作者: Llewelyn Stearns
DOI:
关键词: Photolithography 、 Coating 、 Materials science 、 Epoxy 、 Isotropic etching 、 Composite material 、 Etching (microfabrication) 、 Layer (electronics) 、 SU-8 photoresist 、 Photoresist
摘要: An improved process for providing a design within metallic surface by composite photoresist techniques in which the has sufficient chemical resistance to permit etching design, with an aqua-regia or fluoride system most commercially available corrosion resistant and high temperature alloys metals. The consists applying first coating of epoxy resin other metal substrate be etched; subsequently conventional material upon cured resin; photomask said desired pattern; exposing light source actuate photoresist; chemically removing non-activated areas; underlying areas preferably means concentrated solution sulfuric acid, dissolves but does not attack thereby same pattern as that developed photoresist, mixture acids capable reacting under reaction conditions chosen, layer.