Plasma ion source mass spectrometer
作者： Masamichi Tsukada , Akira Owada , Toyoharu Okumoto
DOI:
关键词: Ionization 、 Chemistry 、 Ion source 、 Inductively coupled plasma mass spectrometry 、 Ion gun 、 Atomic physics 、 Mass spectrometry 、 Ion beam deposition 、 Secondary ion mass spectrometry 、 Plasma 、 Analytical chemistry
摘要: A plasma ion source mass spectrometer comprising a 40 for ionizing sample with plasma; filter 60 subjecting the ionized by to spectrometry; and an interface unit 50 having orifice formed in cone 52, 54 introducing into 60. Further comprises first cooler 49 cooling generator 41 of generating power 44; second 56 independent 49, raising temperature changing efficiency so as reduce influence deposition on 50. With this construction, can be controlled without analysis sensitivity spectrometer.
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