Measurement of Strength of Thin Film Interfaces by Laser Spallation Experiment

摘要: Laser Spallation Experiment is developed to measure the strength of planar interfaces between a substrate and thin coating(.3 3 μm). In this technique laser pulse high enough energy pre-determined length converted into pressure critical amplitude width that sent through toward free surface with coating. The reflected tensile wave from coating pries off stress accomplishes removal determined computer simulation process. itself verified by means piezoelectric crystal probe capable mapping out profile generated pulse. Interface values ranging 3.7 1053 GPa are for Si/SiC system, whereas carbon/SiC an average value 6.91 obtained. Furthermore, sufficient experimental evidences provided show potential determine interface toughness, well characterizable flaws can be planted on interface.