作者: S. S. Chiang , D. B. Marshall , A. G. Evans
DOI: 10.1007/978-1-4684-3947-2_53
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摘要: An indentation method for determining the adhesion of interfaces between thin films and substrates has been developed. The provides a quantitative measure interface fracture resistance advantage simplicity reproducibility demonstrated range ZnO/Si systems adherence correlated with acoustic properties.