Fast-response surface acoustic wave humidity sensor based on hematoporphyrin film

作者: R. Rimeika , D. Čiplys , V. Poderys , R. Rotomskis , M.S. Shur

DOI: 10.1016/J.SNB.2009.02.009

关键词: Surface acoustic wave sensorAnalytical chemistryHumidityWavelengthOpticsSurface acoustic wavePhase (waves)AttenuationChemistryRelative humidityAmplitude

摘要: Abstract The fast-response and high-sensitivity surface acoustic wave sensor based on the hematoporphyrin (Hp) layer–lithium niobate (LiNbO 3 ) structure has been investigated. amplitude phase of Hp–LiNbO SAW delay line output signal were measured as functions relative humidity (RH) at steady-state conditions time upon step-like RH variation. Both attenuation velocity strongly depend due to water sorption by Hp film. At frequency 86 MHz, changes −0.8 dB in transmission loss −3° per 1% obtained, corresponding 110 ppm/1% change 1.23 × 10 −3 wavelength. exhibits fast response step jump up recovery abrupt drop down with characteristic times about 1 s. applicability for human breath monitoring is demonstrated.

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