Delivery device, methods of manufacture thereof and articles comprising the same

作者: Deodatta Vinayak Shenai-Khatkhate , Ronald L. DiCARLO , Egbert Woelk

DOI:

关键词: Normalization propertyInterference fitTube (fluid conveyance)Electrical engineeringInletMaterials scienceAcoustics

摘要: Disclosed herein is a delivery device comprising chamber; gas inlet; outlet; and dip tube contained within the chamber having an upper portion lower portion, of being in fluid communication with inlet operative to permit entry carrier gas; extending into chamber, terminating outlet end; sleeve; where sleeve has first end second interference fit tube; vibrates upon subjected disturbance.

参考文章(87)
Yuji Araki, Masahito Abe, Kuniaki Horie, Hidenao Suzuki, Takeshi Murakami, Hiroyuki Ueyama, Fumio Kuriyama, Tsutomu Nakada, Liquid feed vaporization system and gas injection device ,(1997)
Steve H. Chiao, Wei Ti Lee, Ampoule splash guard apparatus ,(2005)
Craig C. Collins, Michael A. Richie, Lowell B. Campbell, Brian Charles Goodrich, Fred F. Walker, Liquid source bubbler ,(1991)
Matthew R. Witzman, Richard A. Bradley, Eric R. Cox, Christopher W. Lantman, Linear aperture deposition apparatus and coating process ,(2001)
Charles Michael Birtcher, Thomas Andrew Steidl, Xinjian Lei, Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel ,(2007)
David Howard Levy, James T. Murray, Roger Stanley Kerr, Delivery device for deposition ,(2007)