In-depth electrode light valve array devices and improved fabrication method therefor
作者： Joseph Yorks Kaukeinen
DOI:
关键词: Groove (engineering) 、 Electrical engineering 、 Electrode 、 Reference electrode 、 Wafer 、 Engineering 、 Light valve 、 Stencil 、 Optoelectronics 、 Fabrication 、 Depth electrode
摘要: A method of making a linear light valve array having plurality transversely driven, discretely addressable, electro-optic gates, includes the steps (i) cutting parallel grooves (20, 21) uniform depth to form land region (11) on wafer electro-optical material (12); (ii) holding stencil (26) reference and address electrode patterns (S) over groove portions wafer; (iii) depositing conductive through electrodes opposing side walls region. Linear two-dimensional modulator devices made by such are disclosed also.
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