Load port device, transport system, and container carrying out method
作者： Tadamasa Tominaga
DOI:
关键词: Container (abstract data type) 、 Port (circuit theory) 、 Mechanism (engineering) 、 Ceiling (aeronautics) 、 Engineering 、 Controller (computing) 、 Mechanical engineering 、 Nozzle 、 Waste management 、 Transport system 、 Purge
摘要: A load port device conveys a container including gas to an outer conveyor unit by using ceiling transportation vehicle. The includes conveyor, purging device, and stocker controller. extends the unit. is arranged near unit, supply nozzle purge into while connected port, first lifting mechanism that moves toward or away from port. controller controls container, stop supplying based on arrival of vehicle
lens.org 参考文章(16)
Mitsutoshi Ochiai, Mitsuo Natsume, Takumi Mizokawa, Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method ,(2011)
Hitoshi Suzuki, Tsutomu Okabe, Purge system for a product container and table for use in the purge system ,(2006)
Hisaharu Seita, Method for transporting boards, load port apparatus, and board transport system ,(2002)
Akito Tai, Hisanori Matsumoto, Yoichi Motoori, Overhead travelling carriage system ,(2003)
Makoto Maejima, Hiroshi Itou, Masaru Seki, Takehiko Yoshimura, Load port and adaptor ,(2004)
Chien-Jung Huang, Cheng-Chang Chang, Pod transfer system having retractable mast and rotatable and vertically movable hoist ,(2002)
Wei-Cheng Wang, Chih-Wei Huang, Wen-Chieh Tsou, Yung-Ho Chen, Method and structure for automated inert gas charging in a reticle stocker ,(2008)
Eric J. Shero, Joseph C. Reed, Method and apparatus for minimizing contamination in semiconductor processing chamber ,(2009)
Hiroshi Shinya, Yuichi Sakai, Mitsuo Yamashita, Shigeki Aoki, Heat processing apparatus and heat processing method ,(2007)
Alexander H. Anderson, James G. Sackett, David E. Weldon, Local store for a wafer processing station ,(2003)