Storage Facility for Semiconductor Containers
作者： Miho Yamakawa , Daiki Michishita
DOI:
关键词:
摘要: A storage facility for semiconductor containers is provided. The structure has partitioning walls including a side wall portion extending along vertical direction, and holding space partitioned off from exterior by the walls. Inactive gas enriched air, which contains higher concentration of inactive than contained in air space, supplied to space. And first opening allowing being carried into out be moved through formed portion. inlet located at position adjacent an edge opening. drawing-in device provided discharge drawn outside divided
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