Micromachined porous polymer for bubble free electro-osmotic pump
作者： Senol Mutlu , Cong Yu , P. Selvaganapathy , F. Svec , C.H. Mastrangelo
DOI: 10.1109/MEMSYS.2002.984050
关键词: Surface micromachining 、 Electronic engineering 、 Spark plug 、 Bubble 、 Porosity 、 Back pressure 、 Materials science 、 Wafer 、 Necking 、 Composite material 、 Porous medium
摘要: A novel porous polymer was microfabricated to serve as a plug for new device, the electro-osmotic pump (pp-EOP). The eliminates any back pressure effects while enhances flow in channel. pp-EOP batch fabricated by surface micromachining on top of silicon wafer. device is driven periodic, zero-average injected current signal at low frequencies producing bubble-free with reversible net movement. Testing produced an average water-air interface velocity 1.8 /spl mu/m/s 0.8 Hz. increased 4.8 and 13.9 necking channel size.
sci-hub.se 参考文章(9)
C F McConaghy, A Lemoff, A P Lee, R R Miles, An AC magnetohydrodynamic micropump: towards a true integrated microfluidic system Transducers 99, the 10th International Conference on Solid-State Sensors and Actuators, Sendai (JP), 06/07/1999--06/10/1999. ,(1999)
Phillip H. Paul, Don W. Arnold, David J. Rakestraw, Electrokinetic Generation of High Pressures using Porous Microstructures Springer, Dordrecht. pp. 49- 52 ,(1998) , 10.1007/978-94-011-5286-0_11
W.E. Morf, O.T. Guenat, N.F. de Rooij, Partial electroosmotic pumping in complex capillary systems Sensors and Actuators B: Chemical. ,vol. 72, pp. 266- 272 ,(2001) , 10.1016/S0925-4005(00)00673-0
E.T. Carlen, C.H. Mastrangelo, Paraffin actuated surface micromachined valves international conference on micro electro mechanical systems. pp. 381- 385 ,(2000) , 10.1109/MEMSYS.2000.838547
Cong Yu, Frantisek Svec, Jean M. J. Fréchet, Towards stationary phases for chromatography on a microchip: molded porous polymer monoliths prepared in capillaries by photoinitiated in situ polymerization as separation media for electrochromatography. Electrophoresis. ,vol. 21, pp. 120- 127 ,(2000) , 10.1002/(SICI)1522-2683(20000101)21:1<120::AID-ELPS120>3.0.CO;2-H
Asuncion V Lemoff, Abraham P Lee, An AC magnetohydrodynamic micropump Sensors and Actuators B-chemical. ,vol. 63, pp. 178- 185 ,(2000) , 10.1016/S0925-4005(00)00355-5
A Manz, C S Effenhauser, N Burggraf, D J Harrison, K Seiler, K Fluri, Electroosmotic pumping and electrophoretic separations for miniaturized chemical analysis systems Journal of Micromechanics and Microengineering. ,vol. 4, pp. 257- 265 ,(1994) , 10.1088/0960-1317/4/4/010
Richard BM Schasfoort, Stefan Schlautmann, Jan Hendrikse, Albert Van Den Berg, Field-Effect Flow Control for Microfabricated Fluidic Networks Science. ,vol. 286, pp. 942- 945 ,(1999) , 10.1126/SCIENCE.286.5441.942
P. Selvaganapathy, Yit-shun Leung Ki, P. Renaud, C.H. Mastrangelo, Bubble-free electrokinetic pumping IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 11, pp. 448- 453 ,(2002) , 10.1109/JMEMS.2002.803415