The wide variety of possible applications of micro-thermofluid control

摘要: The possible applications of micro-thermofluid control are reviewed here, mainly on the basis seventeen proceedings IEEE International Workshops and Conferences Micro Electro Mechanical Systems held since 1987. contents consist three aspects. first is thermofluid in microsystems; particularly, attention focused various types micropumps. second miniaturized machines such as a microturbine microcooler. third for conventional-sized flow phenomena turbulent shear flows flapping-wing micro-aerial vehicle. author stresses that, this field, considerable advances have been achieved by relatively young researchers with backgrounds other than classical dynamics, many challenging works progress which will lead to new possibilities field dynamics. Also, has gained impression that researchers’ byword recently changed from “what can MEMS research do?” should