Electrostatic driven 3-way silicon microvalve for pneumatic applications
作者： S. Messner , J. Schaible , J. Vollmer , H. Sandmaier , R. Zengerle
DOI: 10.1109/MEMSYS.2003.1189694
关键词:
摘要: For the first time we present a normally-closed electrostatic driven 3-way microvalve which is able to meet requirements of industrial applications like small form factor, high flow rate, low weight, power consumption and short response time. The consists 3 layer silicon chip stack mounted on ceramics substrate, covered by plastic cap. A driver electronics converts TTL level actuation voltage 200 V put top valve. valve operates in pressure range up 10 bar has rate approx. 500 ml/min. Due principle below 5 mW 1 ms.
sci-hub.se 参考文章(3)
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