Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques

作者: Sanjit K. Debnath , Mahendra P. Kothiyal , Seung-Woo Kim

DOI: 10.1016/J.OPTLASENG.2009.06.014

关键词: Spectral density estimationHilbert–Huang transformOpticsFourier transformWhite light interferometryShort-time Fourier transformAdaptive-additive algorithmHilbert spectral analysisPhysicsHarmonic wavelet transform

摘要: … including Fourier transform, Hilbert transform, spatial phase … source spectrum modulation in Hilbert transform procedure. … by a spectrometer to produce a series of constituent …

参考文章(32)
Qian Kemao, Windowed Fourier transform for fringe pattern analysis Applied Optics. ,vol. 43, pp. 2695- 2702 ,(2004) , 10.1364/AO.43.002695
Byron S. Lee, Timothy C. Strand, Profilometry with a coherence scanning microscope. Applied Optics. ,vol. 29, pp. 3784- 3788 ,(1990) , 10.1364/AO.29.003784
Mark Davidson, Kalman Kaufman, Isaac Mazor, Felix Cohen, An Application Of Interference Microscopy To Integrated Circuit Inspection And Metrology Integrated Circuit Metrology, Inspection, & Process Control. ,vol. 0775, pp. 233- 249 ,(1987) , 10.1117/12.940433
Patrick Sandoz, Gilbert Tribillon, Hervé Perrin, High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferograms Journal of Modern Optics. ,vol. 43, pp. 701- 708 ,(1996) , 10.1080/09500349608232777
P. Hariharan, B. F. Oreb, T. Eiju, Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm. Applied Optics. ,vol. 26, pp. 2504- 2506 ,(1987) , 10.1364/AO.26.002504
L. R. Watkins, S. M. Tan, T. H. Barnes, Determination of interferometer phase distributions by use of wavelets. Optics Letters. ,vol. 24, pp. 905- 907 ,(1999) , 10.1364/OL.24.000905
Violeta Dimitrova Madjarova, Hirofumi Kadono, Satoru Toyooka, Dynamic electronic speckle pattern interferometry (DESPI) phase analyses with temporal Hilbert transform. Optics Express. ,vol. 11, pp. 617- 623 ,(2003) , 10.1364/OE.11.000617
Sanjit K Debnath, Mahendra P Kothiyal, Optical profiler based on spectrally resolved white light interferometry Optical Engineering. ,vol. 44, pp. 013606- ,(2005) , 10.1117/1.1828468
Patrick Sandoz, An algorithm for profilometry by white-light phase-shifting interferometry Journal of Modern Optics. ,vol. 43, pp. 1545- 1554 ,(1996) , 10.1080/09500349608232826
Kieran G. Larkin, Efficient nonlinear algorithm for envelope detection in white light interferometry Journal of The Optical Society of America A-optics Image Science and Vision. ,vol. 13, pp. 832- 843 ,(1996) , 10.1364/JOSAA.13.000832