Lead zirconate titanate ferroelectric thin film capacitors: Effects of surface treatments on ferroelectric properties
作者： Ye Chen , Paul C. McIntyre
DOI: 10.1063/1.2769394
关键词: Oxide 、 Coercivity 、 Layer (electronics) 、 Materials science 、 Composite material 、 X-ray photoelectron spectroscopy 、 Inorganic chemistry 、 Ferroelectricity 、 Lead zirconate titanate 、 Chemical vapor deposition 、 Surface layer
摘要: X-ray photoelectron spectroscopy (XPS) revealed a lead-rich carbonatelike surface layer on polycrystalline lead zirconate titanate films grown by metal-organic chemical vapor deposition. In situ XPS studies indicated that originally present in the oxide film reacted with Pt during its deposition, forming Ti∕Zr-rich defective interfacial layer. Lead underwent nitric acid treatment, which effectively removed layer, exhibited stretched out of hysteresis loop vicinity coercive field, consistent presence nonferroelectric passive Reasonable agreement between XPS-measured interface thickness and determined electrical characterization was obtained.
scitation.org
harvard.edu
aip.org
sci-hub.se 参考文章(12)
B. S. Kang, D. J. Kim, J. Y. Jo, T. W. Noh, Jong-Gul Yoon, T. K. Song, Y. K. Lee, J. K. Lee, S. Shin, Y. S. Park, Polarization retention in Pb(Zr0.4Ti0.6)O3 capacitors with IrO2 top electrodes Applied Physics Letters. ,vol. 84, pp. 3127- 3129 ,(2004) , 10.1063/1.1710715
Maxim B. Kelman, Paul C. McIntyre, Alexei Gruverman, Bryan C. Hendrix, Steven M. Bilodeau, Jeffrey F. Roeder, Origin and implications of the observed rhombohedral phase in nominally tetragonal Pb(Zr0.35Ti0.65)O3 thin films Journal of Applied Physics. ,vol. 94, pp. 5210- 5219 ,(2003) , 10.1063/1.1610773
L. F. Fu, S. J. Welz, N. D. Browning, M. Kurasawa, P. C. McIntyre, Z-contrast and electron energy loss spectroscopy study of passive layer formation at ferroelectric PbTiO3∕Pt interfaces Applied Physics Letters. ,vol. 87, pp. 262904- ,(2005) , 10.1063/1.2144279
M. Grossmann, O. Lohse, D. Bolten, U. Boettger, T. Schneller, R. Waser, The interface screening model as origin of imprint in PbZrxTi1−xO3 thin films. I. Dopant, illumination, and bias dependence Journal of Applied Physics. ,vol. 92, pp. 2680- 2687 ,(2002) , 10.1063/1.1498966
S. Aggarwal, K. R. Udayakumar, J. A. Rodriguez, Stoichiometry and phase purity of Pb(Zr,Ti)O3 thin films deposited by metal organic chemical vapor deposition Journal of Applied Physics. ,vol. 100, pp. 064103- ,(2006) , 10.1063/1.2337258
A. K. Tagantsev, I. Stolichnov, E. L. Colla, N. Setter, Polarization fatigue in ferroelectric films: Basic experimental findings, phenomenological scenarios, and microscopic features Journal of Applied Physics. ,vol. 90, pp. 1387- 1402 ,(2001) , 10.1063/1.1381542
A. K. Tagantsev, M. Landivar, E. Colla, N. Setter, Identification of Passive Layer in Ferroelectric Thin-Films from Their Switching Parameters Journal of Applied Physics. ,vol. 78, pp. 2623- 2630 ,(1995) , 10.1063/1.360122
A. M. Bratkovsky, A. P. Levanyuk, Abrupt Appearance of the Domain Pattern and Fatigue of Thin Ferroelectric Films Physical Review Letters. ,vol. 84, pp. 3177- 3180 ,(2000) , 10.1103/PHYSREVLETT.84.3177
A. Valfouskaya, P. M. Adler, J.-F. Thovert, M. Fleury, Nuclear-magnetic-resonance diffusion simulations in porous media Journal of Applied Physics. ,vol. 97, pp. 083510- ,(2005) , 10.1063/1.1871352
Max Hansen, Kurt Anderko, Constitution of Binary Alloys ,(1958)