Origin and implications of the observed rhombohedral phase in nominally tetragonal Pb(Zr0.35Ti0.65)O3 thin films
作者： Maxim B. Kelman , Paul C. McIntyre , Alexei Gruverman , Bryan C. Hendrix , Steven M. Bilodeau
DOI: 10.1063/1.1610773
关键词: Composite material 、 Single domain 、 Thin film 、 Ferroelectricity 、 Dielectric 、 Ferroelasticity 、 Tetragonal crystal system 、 Materials science 、 Crystallography 、 Annealing (metallurgy) 、 Chemical vapor deposition
摘要: The structural and electrical properties of Pb(Zr0.35Ti0.65)O3 (PZT) thin films ranging in thickness from 700 to 4000 A have been investigated. These (001)/(100)-textured were grown by metalorganic chemical vapor deposition on (111)-textured Ir bottom electrodes. It was observed that, the as-deposited state, thinnest PZT are rhombohedral even though bulk this composition should be tetragonal. Thicker a layered structure with tetragonal at surface electrode interface. In article we investigate origin its effect ferroelectric dielectric capacitors. has suggested that stresses can affect phase stability regions single domain PZT. This possibility investigated piezoresponse microscopy film stress measurements. state majority grains contain ferroelastic domain, whereas after high tempe...
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