Substrate storing equipment and substrate storage method

摘要: PROBLEM TO BE SOLVED: To maintain cleanliness of substrates more simply and effectively. SOLUTION: A semiconductor substrate storing equipment 10 stores 14, which are accommodated in pods 1 is provided with detachable lids 15 for exclusive use, 13 make the 14 come contact or engage accommodate them, a means holding 13, gas supply sources 16 supplying to via 15, amount adjusting valves 18, discharging vacuum pumps 17 discharge 15. Each tightly closed. Inert each pod replaced vacuum-exhausted periodically by use 16, 17, exhaust 19, etc. Thereby condition adjusted 13.