Storage system and storage means
作者： 洋一 田中 , Yoichi Tanaka , Kenji Abe , 剛 仁科 , Takeshi Nishina
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摘要: PROBLEM TO BE SOLVED: To provide a storage system for an object to be stored such as silicon wafer reducing the consumption of purging gas. SOLUTION: The 50 includes sealed container 5 which can store SW in manner and has intake 6a outlet 6b gas, units 1a, 3 where mounted, gas supply paths 4a, 4b supplying 5. are provided with automatic mechanism 8 communicates connects based on mounting starts introducing also controller 40 introduces at first flow rate into newly mounted certain period, second lower than period later. COPYRIGHT: (C)2010,JPO&INPIT
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