Stocker provided with purging functionality, stocker unit, and method for supplying cleaning gas
作者： Takashi Yamaji , Masanao Murata
DOI:
关键词:
摘要: A stocker includes cells including a purge function and not the function. cell is easily changed to that The frame which multiple supports cleaning gas supplying nozzle are configured be attached along vertical direction or horizontal direction, base of unit frame. pipe supply provided base, aligned direction. Each support preferably container from container.
lens.org 参考文章(11)
Kazuo Okubo, Akira Tanaka, 和雄 大久保, 亮 田中, 庸子 店部, Yoko Tanabe, Substrate storage device ,(1998)
洋一 田中, Yoichi Tanaka, Kenji Abe, 剛 仁科, Takeshi Nishina, 賢治 阿部, Storage system and storage means ,(2009)
Yoshiho Yamakawa, Article collecting apparatus ,(2009)
Watabe Kyoji, Air purifying ventilation type article storing equipment ,(2013)
Yung-Shuen Pan, Gas Filling Socket, Gas Filling Socket Set, and Gas Filling Apparatus ,(2008)
Noriaki Yoshikawa, Tadashi Yotsumoto, Terumi Muguruma, Yuichi Kuroda, Clean storage equipment for substrates and method of storing substrates ,(1998)
David L. Halbmaier, Steven P. Kolbow, Anthony Mathius Tieben, Purge system for a substrate container ,(2008)
Richard S. Muka, Automated wafer buffer for use with wafer processing equipment ,(1999)
Raymond S. Martin, Robert Netsch, Anthony C. Bonora, William J. Fosnight, Joshua T. Oden, Terry L. Moshier, Smif pod storage, delivery and retrieval system ,(1998)
Susumu Maetaki, Masanao Murata, Container transport system and measurement container ,(2007)