Smif pod storage, delivery and retrieval system

摘要: A storage, delivery and retrieval system (122) having a rear wall (112) to which is affixed plurality of shelves (114) capable supporting one or more wafer-carrying pods (132). The structure further includes pair vertical rails (116) lying in plane spaced from substantially parallel the shelf-supporting (112). horizontal rail (118) extends between translationally mounted (116), supports gripper (120) movement along (118). (118), allows be positioned at any location within an X-Z including storage (114). two dimensional transport system. That is, all (132) by occurs without leaving This feature contributes overall small footprint (122). Additionally, moves around same as (132), have profile operate directly adjacent These features contribute according present invention.