Gas Filling Socket, Gas Filling Socket Set, and Gas Filling Apparatus

摘要: The present invention is related to a gas filling socket, socket set, and apparatus. comprises carrying base having an upper surface lower surface, the being used carry semiconductor storage device or reticle pod; at least pair of through holes set on base; one input port connecting hole, output another wherein characteristic that: includes angle guiding board disposed side for providing function ensure positioning pod while placed into socket.