Automated wafer buffer for use with wafer processing equipment
作者： Richard S. Muka
DOI:
关键词: Container port 、 Probe card 、 Buffer (optical fiber) 、 Wafer testing 、 Transfer (computing) 、 Wafer 、 Container (type theory) 、 Electronic engineering 、 Optoelectronics 、 Materials science 、 Port (circuit theory)
摘要: An automated wafer buffer is provided for use with a processing system. The includes an I/O port loading and unloading containers, each holding batch of wafers, storage structure storing up to predetermined number containers container at least one during transfer wafers between the A mechanism transfers port, port.
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