Door drive mechanisms for substrate carrier and load lock
作者： Michael W. Pippins , Richard S. Muka , Mitchell A. Drew
DOI:
关键词: Record locking 、 Electrical engineering 、 Substrate (building) 、 Robot end effector 、 Engineering 、 Computer hardware
摘要: A system is provided for batch loading semiconductor wafers into a load lock (22) from portable carrier (32). The supported adjacent chamber. multilevel end effector (84) associated with the chamber includes plurality of spaced sets (92). are engaged and simultaneously retrieved as grouping, then held in subsequent transport, one at time, an transport (28). After transfer to chamber, sealed chambers evacuated. variety mechanisms moving sets, door (44) (80) between closed open positions parked position. Mechanisms also individually then, unit,
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