Sealed standard interface apparatus.
作者： Andrew William O'sullivan , George Allan Maney , W. George Faraco
DOI:
关键词:
摘要: Apparatus for maintaining articles, such as semiconductor wafers (82) clean. The or other articles to be processed are placed in a box (90) having first (1) and second (2) regions making seals. A door (99) seals the into box. has region seal third (3) seal. is used transport port (20) canopy (10) of processing equipment (15). adapted receiving transferring contents with (90). Also, fourth (4) surrounding provided closing when no present. (10). latch (17, 19, 27) latching whereby made released between by operation 27). (45) (45).
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