Transportation system of container and container for measuring

摘要: PROBLEM TO BE SOLVED: To reduce the cost and realize space saving. SOLUTION: A stock 1 is equipped with a hoop 20 for receiving, plurality of purge units 50, 30 measuring stacker crane 60. The receiving receives semiconductor wafers therein. flow meter unit 50 provided rack 51, consisting tables installing to supply nitrogen gas into which are mounted on table. 60 transports container tables, while transported among mutually plural tables. COPYRIGHT: (C)2008,JPO&INPIT