Storage facility and storage method
作者： Toshihito Ueda , Masahiro Takahara
DOI:
关键词:
摘要: A storage facility includes a controller for monitoring supply state of the inactive gas plurality sections and controlling amount adjusting devices. The is configured to monitor by dividing into areas, control devices such that supplied belonging each areas satisfies set restricting condition defined in advance.
lens.org 参考文章(9)
Noriaki Yoshikawa, Tadashi Yotsumoto, Terumi Muguruma, Yuichi Kuroda, Clean storage equipment for substrates and method of storing substrates ,(1998)
Masahiro Takahara, Toshihito Ueda, Inactive gas introducing facility and inactive gas introducing method ,(2012)
Susumu Maetaki, Masanao Murata, Container transport system and measurement container ,(2007)
Takeo Ogura, Hirokazu Yokoi, Tsuyoshi Miyata, Norishige Aoki, Stocker for semiconductor substrates, storage method therefor and fabrication method for semiconductor device using the stocker ,(2005)
洋一 田中, Yoichi Tanaka, Kenji Abe, 剛 仁科, Takeshi Nishina, 賢治 阿部, Storage system and storage means ,(2009)
Goto Ikuo, TRANSPORT VEHICLE SYSTEM ,(2009)
Chuma Takeshi, Morimoto Yuichi, Article transport equipment ,(2013)
Kenneth C Eaton, Article storage apparatus ,(1968)
Masanori Tsujimoto, Yoshimasa Hara, Koji Kubota, Toshisada Mariyama, Natsuo Takagawa, Article transport facility ,(2013)