Gas purge unit, load port apparatus, and installation stand for purging container
作者： Jun Emoto , Hiroshi Igarashi , Mutsuo Sasaki
DOI:
关键词: Container (type theory) 、 Longitudinal direction 、 Port (circuit theory) 、 Materials science 、 Purge 、 Nozzle 、 Base (geometry) 、 Structural engineering 、 Unit load 、 Mechanical engineering
摘要: A gas purge unit includes an intake nozzle 28, a pivotable body 31, and O-ring 35. The 28 has opening 26 flowing out cleaning gas. 31 is arranged in ring shape to surround cylindrical projection b of the provided with contact part 34 formed on tip portion be able detachably port 5. ring-shaped 35 held compressively elastically deformable along longitudinal direction between rear end base 28.
lens.org 参考文章(11)
Tsuyoshi c, Mitsuhiro c, Teruya c, Masanao c, Teppei c, Masanori c, Hitoshi c, Atsushi c, Closed container to be used in a clean room ,(1993)
James J. Sanfilippo, John E. Sanfilippo, Gassing rail apparatus and method ,(1997)
Steven L. Peace, Paul Z. Wirth, Apparatus for processing a workpiece ,(2001)
稔郎 木崎原, Toshiro Kisakibaru, Noriyuki Uesugi, 宣之 上杉, Nozzle unit for n2 gas purge device ,(2012)
Toshihiko Miyajima, Mutsuo Sasaki, Hitoshi Suzuki, Takeshi Kagaya, Purging system and purging method for the interior of a portable type hermetically sealed container ,(2004)
Chin-Ming Lin, Pao-Yi Lu, Wafer container having the purging valve ,(2009)
Robert C. May, William Weaver, William Fosnight, Daniel Babbs, Side opening unified pod ,(2008)
Toshihiko Miyajima, Tsutomu Okabe, Hitoshi Suzuki, Gas replacement system ,(2009)
Takanori Izumi, Nobuhide Shikata, Purging apparatus and purging method ,(2010)
洋一 田中, Yoichi Tanaka, Kenji Abe, 剛 仁科, Takeshi Nishina, 賢治 阿部, Storage system and storage means ,(2009)