Design and implementation of an atomic force microscope with adaptive sliding mode controller for large image scanning
作者： Yuan-Zhi Peng , Jun-Wei Wu , Kuan-Chia Huang , Jyun-Jhih Chen , Mei-Yung Chen
关键词: Compact disc 、 Acoustics 、 Engineering 、 Piezoelectricity 、 Electronic engineering 、 Adaptive control 、 Damper 、 Amplitude 、 Eddy current 、 Control theory 、 Electromagnetics
摘要: Atomic force microscopy (AFM) is an advanced technique which aims to scan a sample through the use of probe or tip; however, conventional atomic microscope system suffers from limitation small scanning range, due short travelling range piezoelectric actuation. In this paper, we propose large measurement- AFM combines both fine positioners and electromagnetic actuations. While positioner provides high speed with nanometer resolution, precision capable 1 mm2 field positioning 30 nm rms error. The overall design stage consists 4 pairs actuator, monolithic serial flexure guidance compression springs, eddy current damper, commercial xyz positioner. Besides, stationary compact disk/digital versatile disk pick-up-head (CD/DVD PUH) used measure amplitude samples. Moreover, adaptive sliding mode controller based on analytical modeling overcome unmodeled uncertainties external disturbances. Finally, preliminary experiments are presented, demonstrating feasibility proposed system.
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