Enlarged atomic force microscopy scanning scope: novel sample-holder device with millimeter range.
作者： A. Sinno , P. Ruaux , L. Chassagne , S. Topçu , Y. Alayli
DOI: 10.1063/1.2773623
关键词: Millimeter 、 Instrumentation 、 Non-contact atomic force microscopy 、 Electronics 、 Optics 、 Microscopy 、 Materials science 、 Metrology 、 Chip 、 Displacement (vector)
摘要: We propose a homemade sample-holder unit used for nanopositionning in two dimensions with millimeter traveling range. For each displacement axis, the system includes long range stage and piezoelectric actuator accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing repeatability performances. The aim of this work demonstrate that near-field microscopy at scale chip possible. we chose characterize highly optical structures. purpose, sample holder was into an atomic force microscope. A topographical image demonstrates overall performances combined system.
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