Wafer level vacuum packaged de-coupled vertical gyroscope by a new fabrication process
作者： H. Song , Y.S. Oh , I.S. Song , S.J. Kang , S.O. Choi
DOI: 10.1109/MEMSYS.2000.838571
关键词: Fabrication 、 Gyroscope 、 Etching (microfabrication) 、 Electrical engineering 、 Materials science 、 Vacuum level 、 Wafer-scale integration 、 Crystalline silicon 、 Surface micromachining 、 Optoelectronics 、 Wafer
摘要: A highly reliable, wafer level vacuum packaged and de-coupled vertical microgyroscope was developed. The gyroscope which had four driving springs two sensing designed fabricated. new fabrication process could realize a high aspect ratio use thick single crystalline silicon as structure layer, proposed. environment for operating vibratory accomplished with packaging at level. of ambient pressure about 150 mtorr. resolution the 0.013/spl deg//sec/Hz/sup 1/2/. output nonlinearity below 2% in /spl plusmn/100/spl deg//s full scale.
sci-hub.se 参考文章(8)
Y.B. Gianchandani, M. Shinn, K. Najafi, Impact of long, high temperature anneals on residual stress in polysilicon Sensors. ,vol. 1, pp. 623- 624 ,(1997) , 10.1109/SENSOR.1997.613728
Markus Lutz, W Golderer, J Gerstenmeier, Jiri Marek, Bernd Maihofer, S Mahler, H Munzel, U Bischof, A Precision Yaw Rate Sensor in Silicon Micromachining SAE Technical Paper Series. ,vol. 2, pp. 847- 850 ,(1997) , 10.4271/980267
S.S. Baek, Y.S. Oh, B.J. Ha, S.D. An, B.H. An, H. Song, C.M. Song, A symmetrical z-axis gyroscope with a high aspect ratio using simple and new process international conference on micro electro mechanical systems. pp. 612- 617 ,(1999) , 10.1109/MEMSYS.1999.746898
Scott G. Adams, James Groves, Kevin A. Shaw, Timothy J. Davis, Dan Cardarelli, Raymond Carroll, Joseph G. Walsh, Mark D. Fontanella, Single-crystal silicon gyroscope with decoupled drive and sense Symposium on Micromachining and Microfabrication. ,vol. 3876, pp. 74- 83 ,(1999) , 10.1117/12.360511
Cimoo Song, Meenam Shinn, Commercial vision of silicon-based inertial sensors Sensors and Actuators A-physical. ,vol. 66, pp. 231- 236 ,(1998) , 10.1016/S0924-4247(98)00048-X
D.R. Sparks, S.R. Zarabadi, J.D. Johnson, Q. Jiang, M. Chia, O. Larsen, W. Higdon, P. Castillo-Borelley, A CMOS integrated surface micromachined angular rate sensor: its automotive applications Sensors. ,vol. 2, pp. 851- 854 ,(1997) , 10.1109/SENSOR.1997.635235
Yongsoo Oh, Byeungleul Lee, Seogsoon Baek, Hosuk Kim, Jeonggon Kim, Seokjin Kang, Cimoo Song, A surface-micromachined tunable vibratory gyroscope Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. pp. 272- 277 ,(1997) , 10.1109/MEMSYS.1997.581824
S. An, Y.S. Oh, B.L. Lee, K.Y. Park, S.J. Kang, S.O. Choi, Y.I. Go, C.M. Song, Dual-axis microgyroscope with closed-loop detection international conference on micro electro mechanical systems. pp. 328- 333 ,(1998) , 10.1109/MEMSYS.1998.659777