Effect of Resident Stress on the Aberration Correction Ability of MEMS Spatial Light Modulator
作者： Fang Rong Hu , Yi Xian Qian , Jun Hao Niu , Li Juan Zhang , Kun Nie
DOI: 10.4028/WWW.SCIENTIFIC.NET/AMR.317-319.1677
关键词: Zemax 、 Stress (mechanics) 、 Surface flatness 、 Strehl ratio 、 Spatial light modulator 、 Radius 、 Optics 、 Physics 、 Curvature 、 Microelectromechanical systems
摘要: In this paper, the effect of resident stress on surface flatness and aberration correction ability spatial light modulator (SLM) is studied. An optical simulation model based ZEMAX software presented to calculate Strehl ratio SLM. The result shows that decrease curvature radius can in ability. Moreover, tensile compressive have same change ratio.
sci-hub.se 参考文章(3)
Jason B. Stewart, Thomas G. Bifano, Steven Cornelissen, Paul Bierden, B. Martin Levine, Timothy Cook, Design and development of a 331-segment tip–tilt–piston mirror array for space-based adaptive optics Sensors and Actuators A: Physical. ,vol. 138, pp. 230- 238 ,(2007) , 10.1016/J.SNA.2007.04.051
Xin Zhang, Tong-Yi Zhang, Man Wong, Yitshak Zohar, Rapid thermal annealing of polysilicon thin films IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 7, pp. 356- 364 ,(1998) , 10.1109/84.735342
T.G. Bifano, H.T. Johnson, P. Bierden, R.K. Mali, Elimination of stress-induced curvature in thin-film structures IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 11, pp. 592- 597 ,(2002) , 10.1109/JMEMS.2002.802908