High-resolution materials characterization by conventional and near-field acoustic microscopy

摘要: Abstract Acoustic microscopy not only allows imaging of sample surfaces with high spatial resolution but also can be exploited to determine quantitatively surface properties. The scanning acoustic microscope (SAM) uses focused waves within a frequency range 100 MHz–2 GHz which yields few μm limited by the wavelength ultrasound. Quantitative determination elastic properties done evaluating measured material signatures in reflection, so-called V(z) curves, and calibrated measurements maximum amplitude specular reflection. Both methods are based on theoretical calculations ultrasonic reflection at special reference applicability these is shown experimentally. fact that detected tip an atomic force (AFM) for lateral given sensor diameter about 10 nm much smaller than wavelength. evaluation AFM images elastic, anelastic adhesive requires description calculation transfer vibrations from insonified AFM-cantilever if its contact surface, together some experimental results discussed this contribution.