Lift pin assembly

Dean Jay Larson, Fangli J. Hao, Lift pin impact management ,(2001)

James B. McKinley, Tow hook replacement hitch ,(2004)

Ming-Ta Chen, Ming Ju, Chung-Chiang Wang, Ming-Kuan Kao, Wafer loading device ,(2001)

Koji Ota, Takahiro Ito, David T. Or, Hiroyuki Takahama, Hiroshi Sato, Keith K. Koai, Substrate support lift pin ,(2006)

Sung-Min Na, Wafer lift pin for manufacturing a semiconductor device ,(2003)

Ying-Yi Chang, Wen-Chen Shi, Chien-Hsing Lai, Lift pin mechanism and substrate carrying device of a process chamber ,(2005)

Toan Q. Tran, Won B. Bang, Yen-Kun V. Wang, Jang Seok Oh, Daniel S. Herkalo, Jin Ho Lee, Dong Hyung Lee, Lift pin assembly for substrate processing ,(2003)

Roman Schertler, Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method ,(1993)

Sheshraj Tulshibagwale, Dmitry Lubomirsky, Avi Tepman, Donald Olgado, Lift pin alignment and operation methods and apparatus ,(2001)

Salvador P. Umotoy, Joseph Yudovsky, Lift pin actuating mechanism for semiconductor processing chamber ,(2001)