Wafer lift pin for manufacturing a semiconductor device
作者： Sung-Min Na
DOI:
关键词:
摘要: A wafer lift pin assembly of an apparatus for manufacturing a semiconductor device comprises lower being driven up and down by external driving means; guide leading the to move down; upper contacting pin, pin; down.
lens.org 参考文章(3)
Michael P. Karazim, Rudolf Gujer, Tetsuya Ishikawa, Thomas K. Cho, Lily L. Pang, Semiconductor wafer support lift-pin assembly ,(2003)
Albert Wang, Wide temperature range chuck system ,(2004)