Novel Measurement System of the Friction Coefficients for the Drie Sidewalls
作者： Il-Han Hwang , Jong-Hyun Lee
DOI: 10.1109/MEMSYS.2006.1627773
关键词: Optics 、 Voltage 、 Mechanics 、 Deep reactive-ion etching 、 System of measurement 、 Spring (device) 、 Normal force 、 Dynamical friction 、 Beam (structure) 、 Actuator 、 Materials science
摘要: A silicon friction meter employing simple beam springs with holding and driving comb actuators was suggested to evaluate the static dynamic coefficients of DRIE sidewalls. After moving shuttle a certain position, symmetric normal force applied on sidewalls by actuators. By ramp increasing voltage, slide distance measured considering spring nonlinearity. The effects contact width, number points were investigated.
sci-hub.se 参考文章(11)
R. Prasad, N. MacDonald, D. Taylor, Micro-instrumentation For Tribological Measurement Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95. ,vol. 2, pp. 52- 55 ,(1995) , 10.1109/SENSOR.1995.721742
Sriram Sundararajan, Bharat Bhushan, Static friction and surface roughness studies of surface micromachined electrostatic micromotors using an atomic force/friction force microscope Journal of Vacuum Science and Technology. ,vol. 19, pp. 1777- 1785 ,(2001) , 10.1116/1.1353539
Niels Tas, Jeroen Wissink, Louis Sander, Theo Lammerink, Miko Elwenspoek, None, Modeling, design and testing of the electrostatic shuffle motor Sensors and Actuators A-physical. ,vol. 70, pp. 171- 178 ,(1998) , 10.1016/S0924-4247(98)00129-0
Jong Hyun Lee, Won Ick Jang, Chang Seung Lee, Yong Il Lee, Chang Auk Choi, Jong Tae Baek, Hyung Joun Yoo, Characterization of anhydrous HF gas-phase etching with CH3OH for sacrificial oxide removal Sensors and Actuators A-physical. ,vol. 64, pp. 27- 32 ,(1998) , 10.1016/S0924-4247(98)80054-X
R. Yeh, S. Hollar, K.S.J. Pister, Single mask, large force, and large displacement electrostatic linear inchworm motors IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 11, pp. 330- 336 ,(2002) , 10.1109/JMEMS.2002.800937
M.G. Lim, J.C. Chang, D.P. Schultz, R.T. Howe, R.M. White, Polysilicon microstructures to characterize static friction international conference on micro electro mechanical systems. pp. 82- 88 ,(1990) , 10.1109/MEMSYS.1990.110254
R.I. Pratt, G.C. Johnson, R.T. Howe, J.C. Chang, Micromechanical structures for thin film characterization TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers. pp. 205- 208 ,(1991) , 10.1109/SENSOR.1991.148838
N.R. Tas, C. Gui, M. Elwenspoek, Static friction in elastic adhesive MEMS contacts, models and experiment international conference on micro electro mechanical systems. pp. 193- 198 ,(2000) , 10.1109/MEMSYS.2000.838515
K. Deng, W.H. Ko, G.M. Michal, A preliminary study on friction measurements in MEMS TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers. pp. 213- 216 ,(1991) , 10.1109/SENSOR.1991.148840
T. Akiyama, D. Collard, H. Fujita, Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 6, pp. 10- 17 ,(1997) , 10.1109/84.557525