Modeling, design and testing of the electrostatic shuffle motor
作者： Niels Tas , Jeroen Wissink , Louis Sander , Theo Lammerink , Miko Elwenspoek
DOI: 10.1016/S0924-4247(98)00129-0
关键词: Electrostatic generator 、 Voltage 、 Transducer 、 Mechanical engineering 、 Electrostatic motor 、 Surface micromachining 、 Linear motor 、 Electrical engineering 、 Engineering 、 Transductor 、 Transformation (function)
摘要: The shuffle motor is a linear electrostatic stepper employing mechanical transformation to obtain large forces and small steps. A model has been made calculate the step size driving voltage as function of load force geometry. consists three polysilicon layers fabricated using surface micromachining. Tests show an effective about 85 nm produced 43 μN at 40 V voltage.
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