Nonlocal problems in MEMS device control

摘要: Perhaps the most ubiquitous phenomena associated with electrostatically actuated MEMS devices is `pull-in' voltage instability. In this instability, when applied voltages are increased beyond a certain critical there no longer steady-state configuration of device where mechanical members remain separate. This instability severely restricts range stable operation many devices. Here, mathematical model an idealized constructed for purpose analyzing various schemes proposed control pull-in embedding into circuit gives rise to nonlinear and nonlocal elliptic problem which analyzed through variety asymptotic, analytical, numerical techniques. The characterized in terms bifurcation diagram model. Variations capacitive shown give variations hence effect distance.