A linear stepping actuator in surface micromachining technology for low voltages and large displacements
作者： M. Baltzer , T. Kraus , E. Obermeier
DOI: 10.1109/SENSOR.1997.635216
关键词: Comb drive 、 Optoelectronics 、 Materials science 、 Electrical engineering 、 Electrode 、 Stepper motor 、 Silicon 、 Actuator 、 Surface micromachining 、 Surface (mathematics) 、 Voltage
摘要: This paper reports on a surface micromachined linear stepping motor for low voltages between 15-30 V, using the attractive electrostatic forces drive electrodes. The maximum width is 3 /spl mu/m. Two types of actuators have been designed, fabricated and successfully tested, yielding accurate displacements more than 100
sci-hub.se 参考文章(1)
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